Surface Micromachining Foundry

The Bosch silicon surface micromachining foundry (Bosch foundry) offers to customers:

• Market- and product oriented approach to microsystem technology
• Simplify the access to microsystem design, prototyping and manufacture
• Standardization to speed up and economize the development
• Transfer existing microsystem technology know-how to user community (customers)

The basic principle is rather easy: a strong interaction between the customer and the Bosch foundry is accompanying the customer throughout the project and ensures a quick and successful development. Shared costs for masks and wafers keep the prices at a reasonable level.

Depending on the experience in microsystem technology, customers might be supported by one of the Design Houses of the Bosch foundry that are well-experienced with the Bosch process as well as the design environment. The service of the Design Houses covers the wide range from feasibility studies and technology consulting to device simulation and layout development. More advanced users can rely on dedicated design tools. Memscap and Corning IntelliSense, market leaders regarding MEMS design software, provide special Bosch foundry templates for their tools Memspro and IntelliSuite.

The Design Houses for the Bosch foundry are:

 FhG ISiT
 HSG IMIT
 Applied Microengineering Ltd