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An MPW consists of 16 different layouts - one wafer yields ~600 chips distributed amongst these 16 layouts

 

Multi-project-wafer (MPW) runs

Customers can have their designs processed in the Bosch fabrication line in Reutlingen, Germany. Several custom designs (up to 16) are combined on a multi-project wafer (MPW). Periodically MPW runs will be processed 3 times a year at a fixed schedule with definite turnaround times.

These MPWs can be used for prototyping and pursuing a custom development. For small series production single-customer wafers can be processed and for volume production the facilities at the wafer fab will be utilized for mass production of the device. The ultimate objective of the program is to enable customers with no or little experience in microsystem technology (MST) or fab-less companies/institutes to have their ideas being realized at highest technological standards.

All MPW wafers are manufactured in the Bosch fabrication line using the same process as 100 million inertial sensors so far. This 6'' wafer fab is state of the art in micromachining technology and offers a wide variety of processes from silicon bulk to surface micromachining with all processes being based on standard submicron CMOS technology.

 

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The production flow for foundry customers:
picture 1 shows a processed MPW with 600 chips - the ordered number of chips is taken from the MPWs and shipped to the customer,
picture 2 depicts a structural detail of a customers gyroscope -
picture 3 finally shows a packaged sensor as the customers uses it for evaluation purposes