Multi-project-wafer (MPW) runs
Customers can have their designs processed in the Bosch fabrication line in Reutlingen, Germany.
Several custom designs (up to 16) are combined on a multi-project wafer (MPW).
Periodically MPW runs will be processed 3 times a year at a fixed schedule with definite turnaround times.
These MPWs can be used for prototyping and pursuing a custom development.
For small series production single-customer wafers can be processed and for volume
production the facilities at the wafer fab will be utilized for mass production of the
device. The ultimate objective of the program is to enable customers with no or little
experience in microsystem technology (MST) or fab-less companies/institutes to have their
ideas being realized at highest technological standards.
All MPW wafers are manufactured in the Bosch fabrication line using the same process as 100 million
inertial sensors so far. This 6'' wafer fab is state of the art in micromachining technology and
offers a wide variety of processes from silicon bulk to surface micromachining with all processes
being based on standard submicron CMOS technology.
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