Bulk Micromachining Foundry

Silicon bulk micromachining plays a vital role in the development of novel applications e.g. microfluidic structures in the field of life sciences. For biological and medical applications various devices based on silicon or silicon-glass have been proposed and developed including arrays for DNA and protein analysis, Lab-on-Chip devices and components for the medical microdosage systems (microvalves and pumps).

Often, the development of highly innovative devices for life science applications is driven by relatively small companies which lack the opportunity to support facilities for high volume production of silicon devices. This gap can be filled by foundries such as Robert Bosch by offering:

• Market- and product oriented approach to microsystem technology
• Simplify the access to microsystem design, prototyping and manufacturing
• Transfer existing microsystem technology know-how to customers

The basic principle is rather easy: a strong interaction between the customer and the Bosch foundry is accompanying the customer throughout the project and ensures a quick and successful development.