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Manufacturing Cluster AMICUS
In case the Bosch foundry does not provide the technology best suited for your custom MST development,
many partners within the Europractice project offer complementary technologies such as bulk micromachining,
thin-film technology or SOI as well as additional services ranging from IC development, assembly and packaging
up to testing and device evaluation.
Robert Bosch GmbH is supporting these activities by organizing a consortium of three MST manufacturers, the manufacturing cluster AMICUS.
AMICUS, a microsystems manufacturing cluster for European users, is the German manufacturing cluster within Europractice and constitutes
of three partners offering complementary MST expertise to customers. These partners are
 Robert Bosch GmbH
Fraunhofer ISiT
HL-Planartechnik
The Fraunhofer ISiT offers graytone-lithography, metal surface micromachining, and design house services,
HL-Planartechnik thin-film and silicon membrane technology.
MEMS products based on these technologies are
- Micromirrors
- Microlenses
- Diffractive optical elements
- Microswitches
- Thermopiles
- Temperature sensors
- Magnetoresistive sensors
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